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語言:
ALD
產品描述
(1)ALD,最初稱為原子層外延(Atomic Layer Epitaxy,ALE),也稱為原子層化學氣相沉積(Atomic Layer Chemical Vapor Deposition,ALCVD)。原子層沉積是在一個加熱反應器中的襯底上連續引入至少兩種氣相前驅體物種,化學吸附的過程直至表面飽和...
產品參數
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