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語言：
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PECVD
產品描述
（1）應用領域：集成電路 IC、微機電系統 MEMS、功率器件 POWER.（2）適用工藝：二氧化硅（LTO、TEOS）、氮化硅（Si3N4（含低應力））、多晶硅（LP-POLY）、磷硅玻璃（BSG）、硼磷硅玻璃(BPSG)、摻雜多晶硅、石墨烯、碳納米管等多種薄膜
產品參數
wow.js
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