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ICP
Product description
（1）ICP is called Inductive Coupled Plasma(ICP) Etching；
（2）Its main components are: upper electrode, ICP RF unit, RF unit, lower electrode system, temperature control system, etc.
（3）It has the advantages of good uniformity, high stability, high selection ratio, etc. It is suitable for 2, 4, 6, 8, 12 inch size processes.

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